Method of forming a metal-insulator - metal capacitor structure in a copper damascene process sequence

ABSTRACT

A method of forming a metal-oxide-metal (MIM), capacitor structure wherein the fabrication procedures used for the MIM capacitor structure are integrated into a process sequence used to form damascene type copper interconnect structures for CMOS type devices, has been developed. The process sequence features a copper damascene connector located overlying exposed portions of a semiconductor substrate, and underlying the MIM capacitor structure. The MIM capacitor structure, comprised a capacitor dielectric layer sandwiched between conductive capacitor plates, is protected during several selective reactive ion etching patterning procedures by an overlying anti-reflective coating (ARC), insulator shape, and by insulator spacers located on the sides of the ARC shape and on the sides of a capacitor dielectric shape. The presence of the insulator shape protects the MIM capacitor structure during a subsequent process used to define another copper danascene connector structure, overlying and contacting the MIM capacitor structure.

BACKGROUND OF THE INVENTION

[0001] (1) Field of the Invention

[0002] The present invention relates to methods used to fabricate semiconductor devices, and more specifically to a method used to fabricate a metal-insulator-metal (MIM), capacitor structure as part of a process sequence used to also form copper damascene interconnect structures.

[0003] (2) Description of Prior Art

[0004] Capacitor structures exhibiting high reliability as well as low defect density, for use in high performance mixed signal and RF circuits, are formed via processes integrated with the processes used to fabricate complimentary metal oxide semiconductor (CMOS), devices. Metal-insulator-metal (MIM), capacitors are usually formed either before, simultaneously, or after, formation of copper interconnect structures, defined via damascene procedures. However several process issues encountered with copper damascene processing can adversely influence the yield and reliability of the MIM structures, formed during a copper damascene process sequence. First, the low dielectric constant (low k), materials used as intermetal dielectric (IMD), layers sometimes formed of polymer layers featuring poor dielectric quality, located surrounding copper damascene or MIM capacitor structures, can present unwanted leakage paths for the adjacent capacitor structures. Secondly, MIM capacitor structures formed directly as damascene structures have the top surface of the metal plate exposed to subsequent processing sequences, such as chemical mechanical polishing (CMP), procedures, which can result in a damaged MIM capacitor structure. In addition exposed edges of already defined MIM capacitor structures can be damaged during subsequent copper damascene fabrication procedures.

[0005] The present invention will describe a method of forming a MIM capacitor structure in a copper damascene process sequence, in which leaky structures resulting from etching of adjacent low k, IMD layers, or from etching of surrounding polymer layer, is eliminated. The present invention will also describe a method of forming an MIM capacitor structure in which the edges of the MIM capacitor structure are not damaged, nor is the top plate of the capacitor structure exposed, during subsequent process sequences. Prior art such as Jang et al, in U.S. Pat. No. 6,387,775 B1, Cook et al, in U.S. Pat. No. 6,001,702, Weng et al, in U.S. Pat. No. 5,946,567, and Chen, in U.S. Pat. No. 6,313,003 B1, describe methods of forming capacitor structures, as well as forming a capacitor structure using a damascene process. However none of these prior art describe the novel procedure used in this present invention wherein a MIM capacitor structure is successfully integrated into a copper damascene process sequence, featuring protection of specific elements of the MIM capacitor structure during subsequent copper damascene processing.

SUMMARY OF THE INVENTION

[0006] It is an object of this invention to integrate a process of fabricating an metal-insulator-metal (MIM), capacitor structure with processes used to fabricate copper damascene structures.

[0007] It is another object of this invention to protect the top metal plate of the MIM capacitor structure during definition of the capacitor structure, or during subsequent damascene procedures.

[0008] It is still another object of this invention to form insulator spacers on the sides of the MIM capacitor structure to eliminate leaky capacitor structures, as well as to eliminate damage of capacitor structure edges, during the final stages of MIM capacitor structure fabrication, and during subsequent copper damascene procedures.

[0009] In accordance with the present invention a method of integrating the formation of a MIM capacitor structure with procedures used to form damascene type, copper interconnect structures used as components of CMOS type devices, is described. A damascene copper structure, used as a bottom plate connector structure for the MIM capacitor structure, is defined in an opening in an intermetallic dielectric (IMD), layer, overlying and contacting elements on, or in, an underlying semiconductor substrate. An MIM stack comprised of an underlying conductive layer, a dielectric layer, an overlying conductive layer, and a anti-reflective coating (ARC), layer, is deposited overlying the bottom plate connector structure. Photolithographic and a first selective dry etching procedure are employed to define an ARC shape in the ARC layer, as well as defining a capacitor top plate shape in the overlying conductive layer. Insulator spacers are then formed on the sides of the ARC shape and on the sides of the capacitor top plate structure using a second selective dry etch procedure for spacer definition, with the second selective dry etch procedure also resulting in patterning of the underlying dielectric layer, defining a capacitor dielectric shape. A third selective dry etch procedure is then used for patterning of the underlying conductive layer, using the ARC shape and the insulator spacers as an etch mask, defining a capacitor bottom plate structure. Photolithographic and dry etching procedures are then employed to define an opening in an overlying IMD layer and in the ARC shape exposing a portion of the top surface of the capacitor top plate structure. Another copper damascene structure, used as a top plate connector structure, is then formed in the opening in the IMD layer and in the ARC shape.

BRIEF DESCRIPTION OF THE DRAWINGS

[0010] The object and other advantages of this invention are best described in the preferred embodiments with reference to the attached drawings that include.

[0011]FIGS. 1-7, which schematically, in cross-sectional style describe key fabrication stages used for the formation of an MIM capacitor structure, wherein the procedures used for formation of the MIM capacitor structure are integrated into the process sequence used to form the damascene type, copper interconnect structures used for CMOS type devices.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0012] The method used to form an MIM capacitor structure, wherein the MIM capacitor structure fabrication procedure is integrated into a process sequence used to form damascene type copper interconnect structures for CMOS type devices, will now be described in detail. Semiconductor substrate 1, shown schematically in FIG. 1, is comprised with CMOS type elements and components needed for high performance mixed signal devices and RF circuits. The specific CMOS elements (not shown in the drawings), located either in, or on semiconductor substrate 1, can be transistor structures in turn comprised with gate insulator layers, gate structures, source/drain regions, and well regions, or the specific CMOS elements can be resistor, capacitor, or underlying metal interconnect structures. Intermetallic dielectric (IMD), layer 2, comprised of a low k layer such as undoped silica glass (USG), or fluorinated silica glass (FSG), is next deposited via low pressure chemical vapor deposition (LPCVD), or via plasma enhanced chemical vapor deposition (PECVD), procedures, to a thickness between about 3,000 to 5,000 Angstroms. The dielectric constant of IMD layer 2, between about 3 to 4, will result in a minimum capacitance therefore allowing improved device performance to be obtained when compared to counterparts employing IMD layers comprised with higher dielectric constants. Photolithographic and reactive ion etching (RIE), dry etch procedure, using CHF₃ as an etchant for IMD layer 2, are employed to define opening 3, in IMD layer 2, exposing a portion of semiconductor substrate 1, a portion containing specific elements of underlying CMOS type components. After removal of the photoresist shape used for definition of opening 3, via plasma oxygen ashing procedures, a copper layer is deposited to a thickness between about 5,000 to 9,000 Angstroms, completely filling opening 3. The copper layer is deposited either via plasma vapor deposition (PVD), or via electroplating procedures. A chemical mechanical polishing (CMP), procedure is next used for planarization, selectively removing portions of the copper layer from the top surface of ID layer 2, resulting in copper damascene structure 4, in opening 3. Copper damascene structure 4, schematically shown in FIG. 1, will be used as a bottom plate connector structure for a MIM capacitor structure, to be subsequently formed.

[0013] The materials needed for formation of an MIM capacitor structure are next deposited, and schematically shown in FIG. 2. Underlying conductive layer 5 a, comprised of titanium nitride (TiN), or tantalum nitride (TaN), is deposited to a thickness between about 300 to 800 Angstroms, via PVD or via chemical vapor deposition (CVD), procedures. Dielectric layer 6 a, comprised of silicon oxide, silicon nitride, or tantalum oxide, is next deposited via LPCVD, PECVD or PVD procedures, at a thickness between about 200 to 600 Angstroms. Overlying conductive layer 7 a, again comprised of TiN or TaN, is deposited to a thickness between about 300 to 800 Angstroms, again via PVD or via chemical vapor deposition (CVD), procedures. Finally anti-reflective coating (ARC), layer 8 a, comprised of silicon oxynitride, is deposited to a thickness between about 300 to 1200 Angstroms, via CVD procedures.

[0014] Definition of the MIM capacitor structure is next addressed and schematically illustrated using FIGS. 3-5. Photolithographic procedures are employed to form photoresist shape 9, which in turn is used as an etch mask to define ARC shape 8 b, and underlying, capacitor top plate structure 7 b. This is accomplished via anisotropic RIE procedures using CF₄ as an etchant for ARC layer 8 a, while Cl₂ is used as a selective etchant to define capacitor top plate structure 7 b, with the selective Cl₂ RIE procedure terminating at the appearance of the top surface of capacitor dielectric layer 6 a. This is schematically shown in FIG. 3.

[0015] Photoresist shape 9, is then removed via plasma oxygen ashing procedure, followed by deposition of a silicon oxide layer, via LPCVD or PECVD procedures, to a thickness between about 500 to 1500 Angstroms. Another anisotropic RIE procedure is performed using CHF₃ as a selective etchant for the silicon oxide layer, resulting in the definition of silicon oxide spacers 9, on the sides of ARC shape 8 b, and on the sides of capacitor top plate structure 7 b. The selective etch properties of this anisotropic RIE procedure also allowed removal of exposed portions of capacitor dielectric layer to be accomplished, resulting in the definition of capacitor dielectric shape 6 b, with this selective dry etch procedure terminating at the appearance of the top surface. of ARC shape 8 b, and at the appearance underlying conductive layer 5 a. This is schematically shown in FIG. 4.

[0016] Using silicon oxide spacers 9, and ARC shape 8 b, as an etch mask, an anisotropic RIE procedure is again employed to selectively etch underlying conductive layer 5 a, resulting in the definition of capacitor bottom plate structure 5 b. The selective, anisotropic RIE procedure allowing the definition of capacitor bottom plate structure 5 b, was performed using Cl₂ as a selective etchant for underlying conductive layer 5 a. The result of this procedure is schematically shown in FIG. 5. MIM capacitor structure 10, is now complete comprised of capacitor top plate structure 7 b, capacitor dielectric shape 6 b; capacitor bottom plate structure 5 b, featuring overlying ARC shape 8 b, and featuring silicon oxide spacer 9, located on the sides of ARC shape 8 b, and on the sides of capacitor top plate structure 7 b, and located overlying the edges of capacitor dielectric shape 6 b.

[0017] The formation of a top plate connector structure used to contact the capacitor top plate structure 7 b, of MIM capacitor structure 10, is next addressed and schematically illustrated using FIG. 6-7. Intermetallic dielectric (IMD) layer 11, comprised of either undoped silica glass (USG), fluorinated silica glass (FSG), or a low k layer, is deposited to a thickness between about 6,000 to 10,000 Angstroms, via CVD, LPCVD, or PECVD procedures. After planarization of IMD layer 11, via CMP procedures, photoresist shape 12, is defined, featuring an opening which exposes a top portion of IMD layer 11. An anisotropic RIE procedure is next performed using CF₄ as an etchant, removing exposed portions of IMD layer 11, and portions of underlying ARC shape 8 b, resulting in the definition of opening 13. The selective RIE procedure terminated at the appearance of the portion of capacitor top plate structure 7 b, exposed in opening 13. This is schematically shown in FIG. 6.

[0018] After the removal of photoresist shape 12, via plasma oxygen ashing procedures, a copper layer is deposited via to a thickness between about 7,000 to 12,000 Angstroms, completely filling opening 13. The copper layer is deposited either via plasma vapor deposition (PVD), or via electroplating procedures. A chemical mechanical polishing (CMP), procedure is next used for planarization, selectively removing portions of the copper layer from the top surface of IMD layer 11, resulting in copper damascene structure 14, located in opening 13, overlying and contacting capacitor top plate structure 7 b. The copper damascene structure will be used as the top plate connector structure for MIM capacitor structure 10. This is schematically shown in FIG. 7. Therefore the use of the selective, anisotropic RIE procedures, the use of silicon oxide spacers, and the use of an overlying ARC shape, allowed a fabrication sequence used to define the MIM capacitor structure to be accomplished without exposing the capacitor top structure to subsequent severe process sequences, and to be accomplished without exposing MIM components to contaminating polymer materials.

[0019] While this invention has been particularly shown and described with reference to, the preferred embodiments thereof, it will be understood by those skilled in the art that various changes in form and details may be made without departing from the spirit and scope of this invention. 

What is claimed is:
 1. A method of fabricating a capacitor structure on a semiconductor substrate, comprising the steps of: forming a first metal connector structure in an opening in a first intermetallic dielectric (IMD), layer, with said underlying metal connector structure overlying and contacting portions of said semiconductor layer; depositing an underlying conductive layer, a capacitor dielectric layer, an overlying conductive layer, and an anti-reflective coating (ARC), layer; performing a first patterning procedure to define a ARC shape in said ARC layer, and to define a capacitor top plate in said overlying conductive layer; forming insulator spacers on sides of said arc shape and on sides of said capacitor top plate; and performing a second patterning procedure using said arc shape and said insulator spacers as an etch mask, to define a capacitor bottom plate shape in said underlying conductive layer, resulting in said capacitor structure comprised of said capacitor top plate, said capacitor dielectric shape, said capacitor bottom plate, with said capacitor structure underlying said arc shape.
 2. The method of claim 1, wherein said first IMD layer is comprised of a low k layer such as undoped silica glass (USG), or fluorinated silica glass (FSG), deposited via low pressure chemical vapor deposition (LPCVD), or via plasma enhanced chemical vapor deposition (PECVD), procedures, to a thickness between about 3,000 to 5,000 Angstroms.
 3. The method of claim 1, wherein said first metal connector structure is a damascene copper structure.
 4. The method of claim 1, wherein said underlying conductive layer is a TiN or TaN layer, deposited to a thickness between about 300 to 800 Angstroms, via PVD or via chemical vapor deposition (CVD), procedures.
 5. The method of claim 1, wherein said capacitor dielectric layer is comprised of either silicon oxide, silicon nitride, or tantalum oxide, obtained via LPCVD, PECVD or PVD procedures to a thickness between about 200 to 600 Angstroms.
 6. The method of claim 1, wherein said overlying conductive layer is a TiN or TaN layer, deposited to a thickness between about 300 to 800 Angstroms via PVD or via CVD procedures.
 7. The method of claim 1, wherein said anti-reflective coating (ARC), layer is a silicon oxynitride layer, deposited at a thickness between about 300 to 1200 Angstroms, via CVD procedures.
 8. The method of claim 1, wherein said first patterning procedure used to define said capacitor top plate in said overlying conductive layer, is an anisotropic reactive ion etch (RIE), procedure, performed using Cl₂ as a selective etchant for said overlying conductive layer.
 9. The method of claim 1, wherein said insulator spacers, defined at a thickness between about 500 to 1500 Angstroms on sides of said ARC shape and on sides of said capacitor top plate, are comprised of silicon oxide.
 10. The method of claim 1, wherein said insulator spacers are formed via an anisotropic RIE procedure performed using CHF₃ as a selective etchant for silicon oxide.
 11. The method of claim 1, wherein said second patterning procedure used to define said capacitor bottom plate in said underlying conductive layer, is an anisotropic reactive ion etch (RIE), procedure, performed using Cl₂ as a selective etchant for said underlying conductive layer.
 12. The method of claim 1, wherein said planarized second IMD layer is comprised of a low k layer such as undoped silica glass (USG), or fluorinated silica glass (FSG), deposited via low pressure chemical vapor deposition (LPCVD), or via plasma enhanced chemical vapor deposition (PECVD), procedures, to a thickness between about 6,000 to 10,000 Angstroms, planarized via a chemical mechanical polishing procedure.
 13. The method of claim 1, wherein said second metal connector structure is a damascene copper structure.
 14. A method of forming a metal-insulator-metal (MIM), capacitor structure, on a semiconductor substrate, comprising the steps of: forming a first intermetallic dielectric (IMD), layer, on said semiconductor layer; forming an opening in said first IMD layer exposing a portion of the top surface of said semiconductor substrate; forming a first copper damascene structure in said opening in said first IMD layer; depositing an underlying titanium nitride layer; depositing a capacitor dielectric layer; depositing an overlying titanium nitride layer; depositing a silicon oxynitride, anti-reflective coating (ARC), layer; performing a first reactive ion etching (RIE), procedure to define a silicon oxynitride ARC shape in said silicon oxynitride ARC layer, and to define a capacitor top plate in said overlying titanium nitride layer, with said first RIE procedure selective terminating at the appearance of said capacitor dielectric layer; depositing a silicon oxide layer; performing a second RIE procedure to form silicon oxide spacers on the sides of said silicon oxynitride ARC shape and on sides of said capacitor top plate, with said second RIE procedure also defining a capacitor dielectric shape then selectively terminating at the appearance of said underlying titanium nitride layer; performing a third RIE procedure using said silicon oxynitride ARC shape and said silicon oxide spacers as an etch mask, to define a capacitor bottom plate shape in said underlying titanium nitride layer, with said third RIE procedure selectively terminating at the appearance of said first IMD layer, resulting in said MIM capacitor structure comprised of said capacitor top plate, said capacitor dielectric shape, said capacitor bottom plate, with said silicon oxynitride ARC shape capping said MIM capacitor structure; depositing a second IMD layer; performing a chemical mechanical polishing (CMP), procedure, planarizing said second IMD layer; forming an opening in said planarized second IMD layer and in said silicon oxynitride ARC shape, exposing a portion of a top surface of said capacitor structure; and forming a second copper damascene structure in said opening in said planarized second IMD layer.
 15. The method of claim 14, wherein said first IMD layer is comprised of a low k layer such as undoped silica glass (USG), or fluorinated silica glass (FSG), deposited via low pressure chemical vapor deposition (LPCVD), or via plasma enhanced chemical vapor deposition (PECVD), procedures, to a thickness between about 3,000 to 5,000 Angstroms.
 16. The method of claim 14, wherein said underlying titanium nitride layer is obtained at a thickness between about 300 to 800 Angstroms, via PVD or via chemical vapor deposition (CVD), procedures.
 17. The method of claim 14, wherein said capacitor dielectric layer is comprised of either silicon oxide, silicon nitride, or tantalum oxide, obtained via LPCVD, PECVD or PVD procedures to a thickness between about 200 to 600 Angstroms.
 18. The method of claim 14, wherein said overlying titanium nitride layer is obtained at a thickness between about 300 to 800 Angstroms via PVD or via CVD procedures.
 19. The method of claim 14, wherein said silicon oxynitride ARC layer is obtained at a thickness between about 300 to 1200 Angstroms, via CVD procedures.
 20. The method of claim 14, wherein said first RIE procedure used to define said capacitor top plate in said overlying titanium nitride layer, is performed using Cl₂ as a selective etchant for said overlying titanium nitride layer.
 21. The method of claim 14, wherein said silicon oxide layer is obtained via LPCVD or PECVD procedures, at a thickness between about 500 to 1500 Angstroms.
 22. The method of claim 14, wherein said second RIE procedure used to define said silicon oxide spacers and to define said capacitor dielectric shape, is performed using CHF₃ as a selective etchant for silicon oxide and for said capacitor dielectric layer.
 23. The method of claim 14, wherein said third RIE procedure used to define said capacitor bottom plate in said underlying titanium nitride layer, is performed using Cl₂ as a selective etchant for said underlying titanium nitride layer.
 24. The method of claim 14, wherein said second IMD layer is comprised of a low k layer such as undoped silica glass (USG), or fluorinated silica glass (FSG), deposited via low pressure chemical vapor deposition (LPCVD), or via plasma enhanced chemical vapor deposition (PECVD), procedures, to a thickness between about 6,000 to 10,000 Angstroms.
 25. A metal-oxide-metal (MIM), capacitor structure on a semiconductor substrate, comprising: a first metal connector structure located in a first opening in a first intermetallic dielectric (IMD), layer, with said first metal connector structure overlying and contacting portions of underlying, said semiconductor substrate; said MIM capacitor structure on top surface of said first MIM layer, and on top surface of said first metal connector structure, with said MIM structure comprised of an underlying capacitor bottom plate, a capacitor dielectric shape, and an overlying capacitor top plate; an insulator shape located only on top surface of said capacitor top plate; insulator spacers located on the sides of said insulator shape and on sides of said capacitor top plate, with said insulator spacers overlying edges of said capacitor dielectric shape; a second ILD layer overlying said insulator shape; a second opening in second ILD layer, and in said second insulator shape, exposing a portion of the top surface of said capacitor top plate; and a second metal connector structure located in said second opening, overlying and contacting a portion of the top surface of said capacitor top plate.
 26. The MIM capacitor structure of claim 25, wherein said first metal connector structure is a copper damascene structure.
 27. The MIM capacitor structure of claim 25, wherein said capacitor bottom plate is comprised of titanium nitride or tantalum nitride, at a thickness between about 300 to 800 Angstroms.
 28. The MIM capacitor structure of claim 25, wherein said capacitor dielectric shape is comprised of either silicon oxide, silicon nitride, or tantalum oxide, at a thickness between about 200 to 600 Angstroms.
 29. The MIM capacitor structure of claim 25, wherein said capacitor top plate is comprised of titanium nitride or tantalum nitride, at a thickness between about 300 to 800 Angstroms.
 30. The MIM capacitor structure of claim 25, wherein said insulator shape located on the top surface of said capacitor top plate, is comprised of silicon oxynitride at a thickness between about 300 to 1200 Angstroms.
 31. The MIM capacitor structure of claim 25, wherein said insulator spacers are comprised of silicon oxide, at a thickness between about 500 to 1500 Angstroms.
 32. The MIM capacitor structure of claim 25, wherein said second metal connector structure is a copper damascene structure. 